Dielectric relaxation characterization and modeling in large frequency and temperature domain: application to 5fF/μm2 Ta2O5 MIM capacitor.
Autor: | Manceau, J.-P., Bruyere, S., Picollet, E., Minondo, M., Grundrich, C., Cottin, D., Bely, M. |
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Zdroj: | 2006 IEEE International Conference on Microelectronic Test Structures; 2006, p199-204, 6p |
Databáze: | Complementary Index |
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