Comparison study from sputtering, sol-gel, and ALD processes developing embedded thin film capacitors.
| Autor: | Jinyong Ahn, Lee, J.Y., Joonsung Kim, Je Gwang Yoo, Changsup Ryu |
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| Zdroj: | 2006 8th Electronics Packaging Technology Conference; 2006, p10-14, 5p |
| Databáze: | Complementary Index |
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