Comparison Study from Sputtering, Sol-Gel, and ALD Processes Developing Embedded Thin Film Capacitors.
| Autor: | Jinyong Ahn, Lee, J.Y., Joonsung Kim, JeGwang Yoo, Changsup Ryu |
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| Zdroj: | 2006 7th International Conference on Electronic Packaging Technology; 2006, p1-5, 5p |
| Databáze: | Complementary Index |
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