Silicon Micromachining by CO2 Laser.
| Autor: | Chung, C.K., Wu, M.Y., Wu, J.C., Sung, Y.C., Huang, G.R. |
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| Zdroj: | 2006 1st IEEE International Conference on Nano/Micro Engineered & Molecular Systems; 2006, p1445-1448, 4p |
| Databáze: | Complementary Index |
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