Fabrication of Nano-scale Reference Materials with Scanning Probe Microscopy (SPM)-based Lithography.

Autor: Wei-Xuan Jing, Zhuang-De Jiang, Ming-Zhi Zhu, Feng-Xia Zhao, Guo-Qiang Han
Zdroj: 2006 1st IEEE International Conference on Nano/Micro Engineered & Molecular Systems; 2006, p1194-1197, 4p
Databáze: Complementary Index