Fabrication and Characterization of Probes for Combined SPM Techniques Based on PECVD.
| Autor: | Zhu, M.Z., Jiang, Z.D., Yang, B., Jing, W.X., Zhang, H. |
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| Zdroj: | 2006 1st IEEE International Conference on Nano/Micro Engineered & Molecular Systems; 2006, p121-125, 5p |
| Databáze: | Complementary Index |
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