Device Scaling Effect on the Spectral Absorptance of Wafer Front Side.
| Autor: | Kang Fu, Yu-Bin Chen, Pei-feng Hsu, Zhang, Z.M. |
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| Zdroj: | 2006 14th IEEE International Conference on Advanced Thermal Processing of Semiconductors; 2006, p267-283, 17p |
| Databáze: | Complementary Index |
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