Flash Annealing Technology for USJ: Modeling and Metrology.
| Autor: | Gelpey, J., McCoy, S., Camm, D., Lerch, W., Paul, S., Pichler, P., Borland, J.O., Timans, P. |
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| Zdroj: | 2006 14th IEEE International Conference on Advanced Thermal Processing of Semiconductors; 2006, p103-110, 8p |
| Databáze: | Complementary Index |
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