Polysilicon fatigue test-bed monitoring based on the 2nd harmonic of the device current measurement.
| Autor: | Ferraris, E., Fassi, I., De Masi, B., Sarto, M.D. |
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| Zdroj: | 2005 International Conference on MEMS,NANO & Smart Systems; 2005, p55-60, 6p |
| Databáze: | Complementary Index |
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