Ultraviolet exposure activated oxidation of silicon carbide.
| Autor: | Svetlichnyi, A.M., Polyakov, V.V., Kocherov, A.N. |
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| Zdroj: | 2003 Siberian Russian Workshop on Electron Devices & Materials. Proceedings 4th Annual (IEEE Cat. No.03EX664); 2003, p46-48, 3p |
| Databáze: | Complementary Index |
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