Uncertainties caused from surface contaminations to estimate the thickness of SiO2 ultrathin films.
| Autor: | Azuma, Y., Fujimoto, T., Kojima, I., Shinozaki, A., Morita, M. |
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| Zdroj: | 2002 International Microprocesses & Nanotechnology Conference, 2002. Digest of Papers; 2002, p258-258, 1p |
| Databáze: | Complementary Index |
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