Ultra-thin body PMOSFETs with selectively deposited Ge source/drain.

Autor: Yang-Kyu Choi, Daewon Ha, Tsu-Jae King, Chenming Hu
Zdroj: 2001 Symposium on VLSI Technology. Digest of Technical Papers (IEEE Cat. No.01 CH37184); 2001, p19-20, 2p
Databáze: Complementary Index