MEMS-based gray-scale lithography.
| Autor: | Waits, C.M., Ghodssi, R., Ervin, M.H., Dubey, M. |
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| Zdroj: | 2001 International Semiconductor Device Research Symposium. Symposium Proceedings (Cat. No.01EX497); 2001, p182-185, 4p |
| Databáze: | Complementary Index |
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