Nano-scale defect investigation by site-specific transmission electron microscopy and electron energy loss spectroscopy.
| Autor: | Kato, N.I., Nishikawa, A., Matsuzawa, J., Wonjin Moon, Kohno, Y. |
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| Zdroj: | 2001 IEEE International Symposium on Semiconductor Manufacturing. ISSM 2001. Conference Proceedings (Cat. No.01CH37203); 2001, p355-358, 4p |
| Databáze: | Complementary Index |
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