Low k material optimization.
| Autor: | MacWilliams, K., Huang, J., Schulberg, M., Van Cleemput, P. |
|---|---|
| Zdroj: | 2001 IEEE International Symposium on Semiconductor Manufacturing. ISSM 2001. Conference Proceedings (Cat. No.01CH37203); 2001, p203-205, 3p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|