Wafer level testing of inter-line reliability in copper/low-k structures.
| Autor: | Alers, G.B., Harm, G., Suwwan De Felipe, T. |
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| Zdroj: | 2001 IEEE International Integrated Reliability Workshop. Final Report (Cat. No.01TH8580); 2001, p83-86, 4p |
| Databáze: | Complementary Index |
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