An effective SPC approach to monitoring semiconductor quality data with multiple variation sources.
| Autor: | Argon Chen, Ruey-Shan Guo, Pei-Chen Yeh |
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| Zdroj: | 2000 Semiconductor Manufacturing Technology Workshop (Cat. No.00EX406); 2000, p279-282, 4p |
| Databáze: | Complementary Index |
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