Characterization of SiC thin films grown on Si by inductively coupled plasma chemical vapor deposition at low temperatures.
| Autor: | Tai-Fa Young, Chin-Lien Hsiao, Chia-Lin Peng |
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| Zdroj: | 2000 International Semiconducting & Insulating Materials Conference. SIMC-XI (Cat. No.00CH37046); 2000, p291-294, 4p |
| Databáze: | Complementary Index |
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