Investigation of molybdenum contamination in 11B+ and 31P+ implants.
| Autor: | Funk, K., Haublein, V., Chakor, H., Ameen, M., Frey, L., Ryssel, H., Ramirez, A. |
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| Zdroj: | 2000 International Conference on Ion Implantation Technology Proceedings Ion Implantation Technology - 2000 (Cat. No.00EX432); 2000, p711-714, 4p |
| Databáze: | Complementary Index |
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