Solid state pulsed power systems for plasma immersion ion implantation.
| Autor: | Gaudreau, M.P.J., Casey, J.A., Kempkes, M.A., Mulvaney, J.M., Hawkey, T.J. |
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| Zdroj: | 2000 International Conference on Ion Implantation Technology Proceedings Ion Implantation Technology - 2000 (Cat. No.00EX432); 2000, p496-499, 4p |
| Databáze: | Complementary Index |
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