Smart-Cut(R) process: an original way to obtain thin films by ion implantation.
| Autor: | Aspar, B., Lagahe, C., Moriceau, H., Soubie, A., Jalaguier, E., Biasse, B., Papon, A., Chabli, A., Claverie, A., Grisolia, J., Benassayag, G., Barge, T., Letertre, F., Ghyselen, B. |
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| Zdroj: | 2000 International Conference on Ion Implantation Technology Proceedings Ion Implantation Technology - 2000 (Cat. No.00EX432); 2000, p255-260, 6p |
| Databáze: | Complementary Index |
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