A Comparison Between Tunable Fbars with an Integrated and with a Discrete Variable MEMS Capacitor.
Autor: | Wanling Pan, P. Soussan, B. Nauwelaers, R.P. Mertens, H.A.C. Tilmans |
---|---|
Zdroj: | 19th IEEE International Conference on Micro Electro Mechanical Systems; 2006, p902-905, 4p |
Databáze: | Complementary Index |
Externí odkaz: |