A Planar 3 DOF Sample Manipulator for Nano-Scale Characterization.
| Autor: | B.R. de Jong, D.M. Brouwer, H.V. Jansen, M.J. de Boer, T.G. Lammertink, S. Stramigioli, G.J.M. Krijnen |
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| Zdroj: | 19th IEEE International Conference on Micro Electro Mechanical Systems; 2006, p750-753, 4p |
| Databáze: | Complementary Index |
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