Bidirectional electrostatic linear shuffle motor with two degrees of freedom.
| Autor: | Sarajlic, E., Berenschot, E., Fujita, H., Krijnen, G., Elwenspoek, M. |
|---|---|
| Zdroj: | 18th IEEE International Conference on Micro Electro Mechanical Systems, 2005. MEMS 2005; 2005, p391-394, 4p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|