Low motional resistance ring-shaped contour-mode aluminum nitride piezoelectric micromechanical resonators for UHF applications.
| Autor: | Piazza, G., Stephanou, P.J., Porter, J.M., Wijesundara, M.B.J., Pisano, A.P. |
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| Zdroj: | 18th IEEE International Conference on Micro Electro Mechanical Systems, 2005. MEMS 2005; 2005, p20-23, 4p |
| Databáze: | Complementary Index |
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