Emissivity compensated pyrometry for specular silicon surfaces on the NIST RTP test bed.
| Autor: | Tsai, B.K., Bodycomb, J., DeWitt, D.P., Kreider, K.G., Kimes, W.A. |
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| Zdroj: | 12th IEEE International Conference on Advanced Thermal Processing of Semiconductors, 2004. RTP 2004; 2004, p167-172, 6p |
| Databáze: | Complementary Index |
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