Lightpipe proximity effects on Si wafer temperature in rapid thermal processing tools.
| Autor: | Kreider, K.G., Chen, D.H., DeWitt, D.P., Kimes, W.A., Tsai, B.K. |
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| Zdroj: | 11th IEEE International Conference on Advanced Thermal Processing of Semiconductors. RTP 2003; 2003, p125-129, 5p |
| Databáze: | Complementary Index |
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