MEMS technology development and manufacturing in a CMOS foundry.
| Autor: | Liu, C.M., Chou, B.C.S., Tsai, R.C.-F., Shen, N.Y.M., Chen, B.S.F., Cheng, E.C.W., Hsiao Chin Tuan, Kalnitsky, A., Cheng, S., Chung-Hsien Lin, Tien-Kan Chung, Kuei-Sung Chang, Yi-Shao Liu |
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| Zdroj: | 2011 16th International Solid-State Sensors, Actuators & Microsystems Conference (TRANSDUCERS); 2011, p807-810, 4p |
| Databáze: | Complementary Index |
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