Investigation of temporary stiction in poly-SiGe micromirror arrays.
| Autor: | Ling, F.Z., De Coster, J., Lin, W.Y., Witvrouw, A., Celis, J.-P., De Wolf, I. |
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| Zdroj: | 2011 16th International Solid-State Sensors, Actuators & Microsystems Conference (TRANSDUCERS); 2011, p2378-2381, 4p |
| Databáze: | Complementary Index |
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