Planar MEMS RF capacitor integration.
| Autor: | Stamper, A.K., Jahnes, C.V., Dupuis, S.R., Gupta, A., He, Z.-X., Herrin, R.T., Luce, S.E., Maling, J., Miga, D.R., Murphy, W.J., White, E.J., Cunningham, S.J., DeReus, D.R., Vitomirov, I., Morris, A.S. |
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| Zdroj: | 2011 16th International Solid-State Sensors, Actuators & Microsystems Conference (TRANSDUCERS); 2011, p1803-1806, 4p |
| Databáze: | Complementary Index |
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