FEM modeling SAW humidity sensor based on ZnO/IDTs/AlN/Si structures.
| Autor: | Phan, D.T., Chung, G.S. |
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| Zdroj: | 2011 16th International Solid-State Sensors, Actuators & Microsystems Conference (TRANSDUCERS); 2011, p1160-1163, 4p |
| Databáze: | Complementary Index |
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