A high sensitivity SOI electric-field sensor with novel comb-shaped microelectrodes.
| Autor: | Pengfei Yang, Chunrong Peng, Haiyan Zhang, Shiguo Liu, Dongming Fang, Shanhong Xia |
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| Zdroj: | 2011 16th International Solid-State Sensors, Actuators & Microsystems Conference (TRANSDUCERS); 2011, p1034-1037, 4p |
| Databáze: | Complementary Index |
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