Optimisation of seed and mask surfaces in epitaxial lateral overgrowth of indium phosphide on silicon for silicon photonics.

Autor: Junesand, C., Chen Hu, Zhechao Wang, Metaferia, W., Lourdudoss, S.
Zdroj: 2011 & 23rd International Conference on Indium Phosphide & Related Materials Compound Semiconductor Week (CSW/IPRM); 2011, p1-4, 4p
Databáze: Complementary Index