Sensor for gas analysis based on thermal conductivity, specific heat capacity and thermal diffusivity.
| Autor: | Kliche, K., Billat, S., Hedrich, F., Ziegler, C., Zengerle, R. |
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| Zdroj: | 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems (MEMS); 2011, p1189-1192, 4p |
| Databáze: | Complementary Index |
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