Suspended nanochannel in MEMS plate resonator for mass sensing in liquid.
| Autor: | Agache, V., Blanco-Gomez, G., Cochet, M., Caillat, P. |
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| Zdroj: | 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems (MEMS); 2011, p157-160, 4p |
| Databáze: | Complementary Index |
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