Analytical modeling of plus shape MEMS paddle bridge resonant sensor for weak magnetic fields.
| Autor: | Ahmad, F., Khir, M.H.M., Hamid, N.H., Dennis, J.O. |
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| Zdroj: | 2011 IEEE Regional Symposium on Micro & Nanoelectronics (RSM); 2011, p310-314, 5p |
| Databáze: | Complementary Index |
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