Investigation of local stress around TSVs by micro-Raman spectroscopy and finite element simulation.
| Autor: | Le Texier, F., Mazuir, J., Su-Yin, M., Saadaoui, M., Liotard, J., Inal, K. |
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| Zdroj: | Interconnect Technology Conference & 2011 Materials for Advanced Metallization (IITC/MAM), 2011 IEEE International; 2011, p1-3, 3p |
| Databáze: | Complementary Index |
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