An investigation of stiction in poly-SiGe micromirror.
| Autor: | Ling, F.Z., De Coster, J., Beernaert, R., Witvrouw, A., Celis, J., De Wolf, I. |
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| Zdroj: | 2011 IEEE 61st Electronic Components & Technology Conference (ECTC); 2011, p157-162, 6p |
| Databáze: | Complementary Index |
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