Position sensing and electrostatic actuation circuits for 2-D scanning MEMS micromirror.
| Autor: | Duy-Dong Pham, Singh, R.P., Dan-Lei Yan, Kei-Tee Tiew, Bernal, O.D., Langer, T., Hirshberg, A., Minkyu Je |
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| Zdroj: | 2011 Defense Science Research Conference & Expo (DSR); 2011, p1-4, 4p |
| Databáze: | Complementary Index |
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