A new device for highly accurate gas flow control with extremely fast response times.
| Autor: | Boyd, K., Monkowski, A., Chen, J., Ding, T., Malone, R., Monkowski, J. |
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| Zdroj: | Advanced Semiconductor Manufacturing Conference (ASMC), 2011 22nd Annual IEEE/SEMI; 2011, p1-5, 5p |
| Databáze: | Complementary Index |
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