On the technology and ecosystem of 3D / TSV manufacturing.

Autor: Hummler, K., Smith, L., Caramto, R., Edgeworth, R., Olson, S., Pascual, D., Qureshi, J., Rudack, A., Quon, R., Arkalgud, S.
Zdroj: Advanced Semiconductor Manufacturing Conference (ASMC), 2011 22nd Annual IEEE/SEMI; 2011, p1-6, 6p
Databáze: Complementary Index