| Autor: |
Bansod, Tripti, Sindal, B. K., Kumar, Kvanps, Shukla, S. K. |
| Předmět: |
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| Zdroj: |
AIP Conference Proceedings; 6/25/2012, Vol. 1451 Issue 1, p233-235, 3p |
| Abstrakt: |
Use of NEG coating as an integrated pump in accelerators is state of art technique to pump them in UHV range. At UHVTD, RRCAT development of these coatings has also been started. A UHV compatible cylindrical DC magnetron sputtering system was developed for this purpose and evolution of optimized NEG coating parameters is under investigation. Ti-Zr-V NEG films were coated on 400mm and 925mm long chamber with 100mm diameter. Preliminary vacuum performances like ultimate vacuum testing and activation studies with CO pumping for a NEG chamber were studied, which clearly demonstrates large pumping speed for CO. [ABSTRACT FROM AUTHOR] |
| Databáze: |
Complementary Index |
| Externí odkaz: |
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