Autor: |
Baturin, A. S., Chouprik, A. A., Sheshin, E. P., Frolov, V. D., Zavedeev, E. V. |
Zdroj: |
Carbon Nanomaterials in Clean Energy Hydrogen Systems; 2009, p269-274, 6p |
Abstrakt: |
This article discusses mechanisms of scanning-tunneling-microscopy-based nanolithography of ultrathin diamond-like α-C:H films. Results of films modification by short voltage pulses in scanning tunneling microscope (STM) was verified in constant current STM and conductive atomic force microscope (AFM). Critical parameters for STM-nanolithography by this method were determined. Results of modification in ambient conditions and in low vacuum are compared. [ABSTRACT FROM AUTHOR] |
Databáze: |
Complementary Index |
Externí odkaz: |
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