| Autor: |
Doll, Joseph C., Park, Sung-Jin, Rastegar, Ali J., Harjee, Nahid, Mallon Jr., Joseph R., Hill, Ginel C., Barlian, A. Alvin, Pruitt, Beth L. |
| Zdroj: |
Advanced Materials & Technologies for Micro/Nano-Devices, Sensors & Actuators; 2010, p287-298, 12p |
| Abstrakt: |
Piezoresistance is commonly used in micro-electro-mechanical systems for transducing force, pressure and acceleration. Silicon piezoresistors can be fabricated using ion implantation, diffusion or epitaxy and are widely used for their low cost and electronic readout. However, the design of piezoresistive cantilevers is not a straightforward problem due to coupling between the design parameters, constraints, process conditions and performance. Here we discuss the equations and design principles for piezoresistive cantilevers, and present results from cantilevers and systems that we have developed for probing, mechanics studies and sensing, especially for low stiffness or large bandwidth applications. [ABSTRACT FROM AUTHOR] |
| Databáze: |
Complementary Index |
| Externí odkaz: |
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