Mechanism of the growth of amorphous and microcrystalline silicon from silicon tetrafluoride and hydrogen.
| Autor: | Okada, Y., Chen, J., Campbell, I. H., Fauchet, P. M., Wagner, S. |
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| Zdroj: | Journal of Applied Physics; 2/15/1990, Vol. 67 Issue 4, p1757, 4p, 3 Diagrams, 6 Graphs |
| Abstrakt: | Analyzes the growth of amorphous and of microcrystalline silicon over trench patterns in crystalline silicon substrates. Experimental procedures; Experimental results; Conclusion. |
| Databáze: | Complementary Index |
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