The properties of a-C:H films deposited by bias sputtering of carbon.
| Autor: | Zou, J. W., Schmidt, K., Reichelt, K., Dischler, B. |
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| Zdroj: | Journal of Applied Physics; 8/15/1990, Vol. 68 Issue 4, p1558, 5p, 10 Graphs |
| Abstrakt: | Presents a study that examined the properties of amorphous hydrogenated carbon (a-C:H) films deposited by bias sputtering of a carbon target in argon. Background on diamond-like a-C:H films; Measurement of the internal stress, density and hydrogen content of the films; Results and discussion. |
| Databáze: | Complementary Index |
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