Helium implantation effects in hard hydrogenated carbon layers.

Autor:	Boutard, D., Gudowska, I., Scherzer, B. M. U., Möller, W.
Předmět:	HELIUM ions ION implantation CARBON THIN films
Zdroj:	Journal of Applied Physics; 9/1/1990, Vol. 68 Issue 5, p2068, 5p, 1 Chart, 5 Graphs
Abstrakt:	Presents a study which examined the implantation of helium ions in hard hydrogenated carbon layers. Experimental details; Results of the study; Conclusion.
Databáze:	Complementary Index
Externí odkaz:	Zobrazit plný text záznamu