Liquid-phase epitaxy and characterization of Si1-xGex layers on Si substrates.
| Autor: | Hansson, P. O., Werner, J. H., Tapfer, L., Tilly, L. P., Bauser, E. |
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| Zdroj: | Journal of Applied Physics; 9/1/1990, Vol. 68 Issue 5, p2158, 6p, 2 Black and White Photographs, 1 Chart, 3 Graphs |
| Abstrakt: | Presents a study which investigated the liquid-phase epitaxy (LPE) and characterization of silicon-germanium layers on silicon substrates. Details on the LPE growth; Structural properties of the layers; Conclusion. |
| Databáze: | Complementary Index |
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