Interfacial reaction between a Ni/Ge bilayer and silicon (100).

Autor: Li, Jian, Hong, Q. Z., Mayer, J. W., Rathbun, Lynn
Předmět:
Zdroj: Journal of Applied Physics; 3/1/1990, Vol. 67 Issue 5, p2506, 6p, 11 Charts, 1 Graph
Abstrakt: Focuses on a study which examined the sequential formation and dissociation of compounds in the nickel (Ni)/germanium (Ge)/silicon (Si) (100) system using Rutherford backscattering spectroscopy. Interdiffusion between silicon and germanium; Formation of NiGe/NiSi/Si (100); Growth of nickel and silicon.
Databáze: Complementary Index