Anodic oxidation of AlGaAs and detection of the AlGaAs-GaAs heterojunction interface.
Autor: | Fischer, C. W., Teare, S. W. |
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Předmět: | |
Zdroj: | Journal of Applied Physics; 3/1/1990, Vol. 67 Issue 5, p2608, 5p, 7 Graphs |
Abstrakt: | Provides information on a study concerning the anodic oxidation of n-type aluminum (Al) gallium (Ga) arsenic (As) and AlGaAs/GaAs heterojunctions in acid-glycol-water electrolytes. Assessment of the real-time derivative spectra of AlGaAs epitaxial layer; Derivative results of epitaxial layers. |
Databáze: | Complementary Index |
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